Single Hearth Electron Beam Source
The Single Hearth Electron Beam Source is a heavy duty source offering large hearth capacity, high deposition rates, long filament life, and industrial reliability for R&D or production line applications. The source has one (1) crucible which can accept a variety of liners. The source is designed to operate at input power levels up to 12 kW. The 270 ° bent beam design permits complete shielding of the filament from evaporated materials and falling debris. The source is also equipped with a water-cooled trap and permanent magnet for greater operating efficiency and safety. The electron beam can be swept in both the X and Y axis for optimum evaporation.
FEATURES

- Large Pocket -- Up to 40cc
- Interchangeable Crucibles
- 270 Bent Beam Design for Longer Filament Life
- High Operating Efficiency
- XY Sweep Capability
SPECIFICATIONS

Output Power
|
|
- Maximum Power
|
12 kW
|
|
- Emission Voltage
|
10 kV
|
|
- Emission Current
|
Up to 1.2 Amps
|
|
Efficiency
|
In excess of 99% of Beam Power into Hearth
|
Beam Characteristics
|
|
Type
|
270º Beam
|
|
Spot Size
|
0.375" x 0.375"
|
|
Sweep
|
Longitudinal / Lateral with Sweep Controller
|
Required Power
|
|
- Source
|
410 kV, 01.2 A
|
|
Filament
|
08 VAC, 40 A
|
|
Cooling Water
|
1.7 gpm, 45 psi Minimum
|
|
Required Operating Pressure
|
Below 2 x 10-4
|
|
Maximum Bake-Out Temperature
|
250 C
|
Hearth Characteristics
|
|
Material
|
OFHC Copper
|
|
Dimensions*
|
Truncated 30 Cone: 2.0" x 1.50" x 0.92"
(Top x Bottom x Depth)
|
|
Capacity
|
7cc to 40cc
|
|
Liner
|
As Required
|
|
Overall Dimensions
|
5.4" x 4.5" x 5.9" (HxWxL)
(137 mm X 114 mm X 149 mm)
|
|
Weight
|
10 lbs.
|
|
Our Products
New Vacuum Systems
Automatic Valve Controller
Ultra E-beam Source
Power Controller
Feedthroughs
Single Hearth Electron Beam Source
Sweep Controller
Electron Beam Power Supplies
Pre-owned Vacuum Equipment
Vacuum Gauge Controller
Sensor Heads & Crystals
Vacuum Tubes & Capacitors
Multi-Hearth Electron Beam Source
Glow Discharge Power Supply
Yeagle Technology Inc.
140 Nott Hwy.
Ashford, CT 06278
P. 860-429-1908
F. 860-429-7176
sales@ytionline.com
|